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How does RELEASE CLAMP become the guardian in semiconductor wafer processing?

Cixi Hengtuo Hardware Co., Ltd. 2024.09.14
Cixi Hengtuo Hardware Co., Ltd. Industry News

The design of high-precision RELEASE CLAMP needs to take into account multiple aspects to cope with the stringent requirements of semiconductor wafer processing.
Select high-purity materials such as stainless steel, ceramics or special alloys to ensure that no impurities are introduced during the processing process, and have good corrosion resistance to resist chemical erosion in the wafer processing environment. Use soft materials such as polyurethane and rubber on the clamping surface, or apply special coatings to reduce stress concentration and scratch risks on the wafer surface. Design precise alignment mechanisms to ensure that the wafer can be accurately positioned during the clamping process to avoid scratches or breakage caused by misalignment. At the same time, the clamping mechanism must have high stability to resist vibration and impact during processing.
According to the different thickness and material of the wafer, design an adjustable clamping force mechanism to ensure that the wafer can be firmly clamped without damaging its surface due to over-tightening. The clamping surface of the RELEASE CLAMP is precisely polished to ensure a smooth surface and reduce the possibility of scratches. At the same time, strict cleaning treatment is carried out before processing to remove surface impurities and prevent contamination of the wafer.
Integrate high-precision sensors such as position sensors and force sensors to monitor the position and clamping force of the wafer in real time. A closed-loop control system is used to adjust the action of the clamping mechanism in real time according to the information fed back by the sensor to ensure the stability and accuracy of the clamping process.
High-precision RELEASE CLAMP plays an indispensable role in semiconductor wafer processing, and its application value is mainly reflected in the following aspects:
By reducing scratches and contamination, high-precision RELEASE CLAMP helps to improve the flatness and cleanliness of the wafer surface, thereby improving the performance and reliability of semiconductor devices; stable clamping performance and precise alignment mechanism ensure the stability and accuracy of the wafer during processing, reduce the time wasted due to repositioning or repairing scratches, and thus improve production efficiency. Reducing wafer breakage and scrap rate means reducing production costs and waste. At the same time, the durability and stability of high-precision RELEASE CLAMP also reduce the frequency of maintenance and replacement, further reducing production costs. With the continuous development of semiconductor technology, the requirements for wafer processing accuracy are getting higher and higher. As one of the key technologies, the continuous innovation and upgrading of high-precision RELEASE CLAMP will promote the continuous progress of semiconductor processing technology.